We have just installed a new metal organic chemical
vapor deposition furnace from PlanarTECH inside the MNTL cleanroom. We helped PlanarTECH design the MOCVD system so that we can simultaneously test growth of new experimental 2D materials, vary the chemistry during growth to produce alloys and heterostructures, and reliably grow wafer scale monolayers. We are excited to start using the system this summer, and see what it is capable of!
vapor deposition furnace from PlanarTECH inside the MNTL cleanroom. We helped PlanarTECH design the MOCVD system so that we can simultaneously test growth of new experimental 2D materials, vary the chemistry during growth to produce alloys and heterostructures, and reliably grow wafer scale monolayers. We are excited to start using the system this summer, and see what it is capable of!The MNTL has a highlight about this system: http://mntl.illinois.edu/news/article/16487